Surface Charge Profiler QCS2500
Non-contact monitoring of epiwafer resistivity is possible!
The QC2500 series can monitor the resistivity of epitaxial wafers non-contactly. Using the surface photovoltage (SPV) method as the measurement principle, it detects changes in the surface potential of the wafer by irradiating it with pulsed light and measures the width of the depletion layer. Since the width of the depletion layer in a strong inversion state is proportional to the impurity concentration, it performs impurity concentration measurements and converts them to resistivity (ASTM).
- Company：日本セミラボ 新横浜本社
- Price：Other
